MPCVD

MPCVD

WEC-MP6000d is an advanced CVD system for growing high quality CVD diamond as monocrystalline & polycrystalline diamond for variety application as below :

• Gem, Lab-grown diamond
• Optical components
• Shaping & Dressing tools
• Cutting tools
• Heat spreader
• Electrochemical electrodes
• Power devices
• Electric components
• Electron emission device
• Sensors, MEMS, etc

Characteristics

    High Purity Grade/Electric grade Diamond

    • Laser Cutting (Coring/slicing) solution
    • Color Identify Solution for CVD diamond
    • Color Enhance Solution
    • Polished Diamond Solution

Application

    • Gem, Lab-grown diamond
    • Optical components
    • Shaping & Dressing tools
    • Cutting tools
    • Heat spreader
    • Electrochemical electrodes
    • Power devices
    • Electric components
    • Electron emission device
    • Sensors, MEMS, etc

Specification

    Microwave Power 6kW / 2.45GHz
    Reactor Chamber Material Stainless Steel
    Stage Type Water-cooling
    Standard Substrate Holder 50mm (Φ2inch)
    tandard Gas Channel
    (up to 6 channels)
    3 channels (H2/CH4/N2)
    Operating Pressure Range 10~200 torr
    Vacuum Leak Integrity
    (by He leak delector)
    < 1x10-9 mbar. l/sec
    Stage moving Z-axis
    Vacuum Pump Type (Standard) Rotary Vacuum Pump
    [18/22 m3/h (50/60Hz)]
    System Dimension (approx.) W1450xD840xH1950mm
    System Weight (approx.) 350kg